Optical MEMS and micro-optics
Frequency
Every 2 years
Summary
Micro-optics and optical MEMS encompass a wide range of methods, devices and systems that enable precise, high-speed manipulation of light at the wavelength scale. MICRO605 provides a comprehensive insight into this field, covering topics from fundamentals to applications.
Content
1. Optics at the micro-scale: An introduction (0.5 hours)
2. Fundamental optical concepts (2.5 hours)
2.1. Gaussian beam propagation (0.5 hour)
2.2. Scalar diffraction theory (1 hour)
2.3. Interference and interferograms (1 hour)
3. Fundamental micro-electro-mechanical concepts (2 hours)
3.1. Actuation and position sensing (1 hour)
3.2. Modeling of dynamic behavior (1 hour)
4. Building blocks of micro-optics (4 hours)
4.1. Scanning and pointing micromirrors (1 hour)
4.2. Diffraction gratings (1 hour)
4.3. Diffractive and refractive microlenses (1 hour)
4.4. Optical micro-resonators (1 hour)
5. Applications (4 hours)
5.1. Projection displays (1 hour)
5.2. Medical imaging (1 hour)
5.3. Adaptive optics (1 hour)
5.4. Optical switching (1 hour)
6. Emerging topics: A look into the imminent future (1 hour)
EXAM:
Written report on a design study
Learning Prerequisites
Recommended courses
Basic knowledge of physics and mathematics
MICRO-621: Micro and Nanofabrication (MEMS)
MICRO-606: Scaling in MEMS
Resources
Bibliography
Micro-Optics: Elements, Systems and Applications, edited by Hans Peter Herzig
Fundamentals of Micro-Optics, by Hans Zappe
Optical MEMS, Nanophotonics, and Their Applications, edited by Guangya Zhou & Chengkuo Lee
MOEMS: Micro-Opto-Electro-Mechanical Systems, by Manouchehr E. Motamedi
Microsystem Design, by Stephen Senturia
Fundamentals of Microfabrication, by Marc Madou
Micro Electro Mechanical System Design, by J. Allen
Analysis and Design Principles of MEMS Devices, by Minhang Bao
Ressources en bibliothèque
- Micro-Optics: Elements, Systems and Applications / Herzig
- Fundamentals of Micro-Optics / Zappe
- Optical MEMS, Nanophotonics, and Their Applications / Zhou & Lee
- MOEMS: Micro-Opto-Electro-Mechanical Systems / Motamedi
- Microsystem Design / Senturia
- Fundamentals of Microfabrication / Madou
- Micro Electro Mechanical System Design / Allen
- Analysis and Design Principles of MEMS Devices / Bao
Moodle Link
Dans les plans d'études
- Nombre de places: 20
- Forme de l'examen: Ecrit (session libre)
- Matière examinée: Optical MEMS and micro-optics
- Cours: 14 Heure(s)
- Type: optionnel
- Nombre de places: 20
- Forme de l'examen: Ecrit (session libre)
- Matière examinée: Optical MEMS and micro-optics
- Cours: 14 Heure(s)
- Type: optionnel