Summary

Objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class

Content

Keywords

MEMS, FEM simulation, microsensors, microtechnology, microactuators, silicon micromachining

Learning Prerequisites

Recommended courses

Capteurs, Advanced MEMS, Materials and technology of microfabrication, Modeling and simulation of microsystems, Nanotechnology, Flexible bioelectronics, Scaling laws in micro- and nanosystems

Learning Outcomes

By the end of the course, the student must be able to:

• Conduct an experiment
• Report on experiments

Transversal skills

• Demonstrate the capacity for critical thinking

Teaching methods

Practicals suprevised by assistants

Expected student activities

• Make the experiments
• use a lab notebook
• write a short report after each experiment

Assessment methods

• based on work in the lab, anwer to questions during experimental sessions and quality of the report

Supervision

Resources

Moodle Link

• http://moodle.epfl.ch/course/view.php?id=14283