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Fiches de cours
MEMS practicals I
MICRO-501
Enseignant(s) :
Boero GiovanniBrugger Jürgen
Renaud Philippe
Langue:
English
Withdrawal
It is not allowed to withdraw from this subject after the registration deadline.Summary
Objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related classContent
The practical is organized in several lab experiments.
The part I (winter semester) is dedicated to MEMS technology and MEMS simulation:
- Finite element simulation of MEMS
- Design of MEMS actuators
- Fabrication of MEMS actuators
- Caracterization of MEMS actuators
- Noise in sensors
The part 2 (spring smester) is dedicated to sensors:
- capacitive accelerometer
- ISFET
- Glucose sensor
- piezoresistive pressure sensor
- Electrokinetic chip
Keywords
MEMS, FEM simulation, microsensors, microtechnology, microactuators, silicon micromachining
Learning Prerequisites
Recommended courses
Capteurs, Advanced MEMS, Materials and technology of microfabrication, Modeling and simulation of microsystems, Nanotechnology, Flexible bioelectronics, Scaling laws in micro- and nanosystems
Learning Outcomes
By the end of the course, the student must be able to:- Conduct an experiment
- Report on experiments
Transversal skills
- Demonstrate the capacity for critical thinking
Teaching methods
Practicals suprevised by assistants
Expected student activities
- Make the experiments
- use a lab notebook
- write a short report after each experiment
Assessment methods
- based on work in the lab, anwer to questions during experimental sessions and quality of the report
Supervision
Office hours | Yes |
Assistants | Yes |
Resources
Moodle Link
Dans les plans d'études
- SemestreAutomne
- Forme de l'examenPendant le semestre
- Crédits
2 - Matière examinée
MEMS practicals I - TP
2 Heure(s) hebdo x 14 semaines
- Semestre
- SemestreAutomne
- Forme de l'examenPendant le semestre
- Crédits
2 - Matière examinée
MEMS practicals I - TP
2 Heure(s) hebdo x 14 semaines
- Semestre
Semaine de référence
Lu | Ma | Me | Je | Ve | |
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8-9 | |||||
9-10 | |||||
10-11 | |||||
11-12 | |||||
12-13 | |||||
13-14 | |||||
14-15 | |||||
15-16 | |||||
16-17 | |||||
17-18 | |||||
18-19 | |||||
19-20 | |||||
20-21 | |||||
21-22 |
Cours
Exercice, TP
Projet, autre
légende
- Semestre d'automne
- Session d'hiver
- Semestre de printemps
- Session d'été
- Cours en français
- Cours en anglais
- Cours en allemand