MEMS practicals I
MICRO-501 / 3 credits
Teacher(s): Bertsch Arnaud, Boero Giovanni, Brugger Jürgen
Language: English
Withdrawal: It is not allowed to withdraw from this subject after the registration deadline.
Summary
Objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class
Content
The practical is organized in several lab experiments.
The part I (winter semester) is dedicated to MEMS technology and MEMS simulation:
- Finite element simulation of MEMS
- Design of MEMS actuators
- Fabrication of MEMS actuators
- Caracterization of MEMS actuators
- Noise in sensors
The part 2 (spring smester) is dedicated to sensors:
- capacitive accelerometer
- ISFET
- Glucose sensor
- piezoresistive pressure sensor
- Electrokinetic chip
Keywords
MEMS, FEM simulation, microsensors, microtechnology, microactuators, silicon micromachining
Learning Prerequisites
Recommended courses
Capteurs, Advanced MEMS, Materials and technology of microfabrication, Modeling and simulation of microsystems, Nanotechnology, Flexible bioelectronics, Scaling laws in micro- and nanosystems
Learning Outcomes
By the end of the course, the student must be able to:
- Conduct an experiment
- Report on experiments
Transversal skills
- Demonstrate the capacity for critical thinking
Teaching methods
Practicals suprevised by assistants
Expected student activities
- Make the experiments
- use a lab notebook
- write a short report after each experiment
Assessment methods
- based on work in the lab, anwer to questions during experimental sessions and quality of the report
Supervision
| Office hours | Yes |
| Assistants | Yes |
In the programs
- Semester: Fall
- Exam form: During the semester (winter session)
- Subject examined: MEMS practicals I
- Practical work: 3 Hour(s) per week x 14 weeks
- Practical work: 3 Hour(s) per week x 14 weeks
- Type: optional
- Semester: Fall
- Exam form: During the semester (winter session)
- Subject examined: MEMS practicals I
- Practical work: 3 Hour(s) per week x 14 weeks
- Practical work: 3 Hour(s) per week x 14 weeks
- Type: optional
Reference week
| Mo | Tu | We | Th | Fr | |
| 8-9 | |||||
| 9-10 | |||||
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| 21-22 |
Légendes:
Lecture
Exercise, TP
Project, labs, other
Monday, 8h - 11h: Exercise, TP