Scaling in MEMS

MICRO-606 / 1 credit

Language: English

Remark: 2025 edition: August 25 to 27 in Microcity & September 18 in Lausanne

Frequency

Every 2 years

This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.

Introduction to scaling laws: scaling of classical mechanical systems, scaling of classical electrical systems, breakdown in scaling, quantum breakdown.
Thermal effects: conduction, convection, dynamics, breakdown, thermal micro-actuators, microreactors.
Mechanical devices: mass-spring model, mechanical noise, squeeze film effects.
Electrical devices: electrostatic micro-actuators, electrostatic breakdown, tunnel sensors, coils and inductors, electromagnetic micro-actuators, magnetostriction, magnetic beads.
Microfluidics: liquid flow, gas flow, diffusion-mixing, surface tension, entropy trapping.
Electrokinetics: dielectrophresis, EHD and MHD pumps, electrowetting, electroosmosis, capillary electrophoresis.

Scaling laws, thermal micro-actuators, electromagnetic micro-actuators, microfluidics, electrokinetics

By the end of the course, the student must be able to:

Plan and carry out activities in a way which makes optimal use of available time and other resources.
Use a work methodology appropriate to the task.
Communicate effectively with professionals from other disciplines.
Give feedback (critique) in an appropriate fashion.
Demonstrate the capacity for critical thinking
Access and evaluate appropriate sources of information.
Make an oral presentation.

in-class presentation