Coursebooks 2017-2018

PDF
 

Materials and technology of microfabrication

MICRO-431

Lecturer(s) :

Gijs Martinus
Lehnert Thomas

Language:

English

Summary

The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on materials and multidisciplinarity.

Content

1. Elements of mainstream Si technology

2. Multilayer poly-Si micromachining

3. Glass microfabrication

4. Polymer microfabrication

5. Bonding and gluing technologies

6. Electroplating and the LIGA technique

7. Biosensor technologies

8. 3D printing or added manufacturing

9. Microfluidic bioseparation techniques 

10. Magnetic labs-on-a chip

Learning Prerequisites

Recommended courses

Microstructure fabrication technologies I.

Learning Outcomes

By the end of the course, the student must be able to:

Transversal skills

Teaching methods

Lectures and personal study and presentation of relevant papers related to microfabrication by the student.

Assessment methods

Oral examination

Resources

Bibliography

M. Madou, Fundamentals of Microfabrication, 2nd edition, CRC Press, Boca Raton (2002).

S. Franssila, Introduction to Microfabrication, 2nd edition, Wiley, Chicester UK (2010).

Ressources en bibliothèque
Notes/Handbook

Notes by the instructors.

In the programs

    • Semester
       Fall
    • Exam form
       Oral
    • Credits
      3
    • Subject examined
      Materials and technology of microfabrication
    • Lecture
      2 Hour(s) per week x 14 weeks
    • Lecture
      2 Hour(s) per week x 14 weeks
    • Exercises
      1 Hour(s) per week x 14 weeks
    • Exercises
      1 Hour(s) per week x 14 weeks
    • Semester
       Fall
    • Exam form
       Oral
    • Credits
      3
    • Subject examined
      Materials and technology of microfabrication
    • Lecture
      2 Hour(s) per week x 14 weeks
    • Lecture
      2 Hour(s) per week x 14 weeks
    • Exercises
      1 Hour(s) per week x 14 weeks
    • Exercises
      1 Hour(s) per week x 14 weeks

Reference week

 MoTuWeThFr
8-9     
9-10    BS270
10-11    
11-12    BS270
12-13     
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22     
 
      Lecture
      Exercise, TP
      Project, other

legend

  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German