Fiches de cours 2017-2018

PDF
 

Materials and technology of microfabrication

MICRO-431

Enseignant(s) :

Gijs Martinus
Lehnert Thomas

Langue:

English

Summary

The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on materials and multidisciplinarity.

Content

1. Elements of mainstream Si technology

2. Multilayer poly-Si micromachining

3. Glass microfabrication

4. Polymer microfabrication

5. Bonding and gluing technologies

6. Electroplating and the LIGA technique

7. Biosensor technologies

8. 3D printing or added manufacturing

9. Microfluidic bioseparation techniques 

10. Magnetic labs-on-a chip

Learning Prerequisites

Recommended courses

Microstructure fabrication technologies I.

Learning Outcomes

By the end of the course, the student must be able to:

Transversal skills

Teaching methods

Lectures and personal study and presentation of relevant papers related to microfabrication by the student.

Assessment methods

Oral examination

Resources

Bibliography

M. Madou, Fundamentals of Microfabrication, 2nd edition, CRC Press, Boca Raton (2002).

S. Franssila, Introduction to Microfabrication, 2nd edition, Wiley, Chicester UK (2010).

Ressources en bibliothèque
Notes/Handbook

Notes by the instructors.

Dans les plans d'études

    • Semestre
       Automne
    • Forme de l'examen
       Oral
    • Crédits
      3
    • Matière examinée
      Materials and technology of microfabrication
    • Cours
      2 Heure(s) hebdo x 14 semaines
    • Cours
      2 Heure(s) hebdo x 14 semaines
    • Exercices
      1 Heure(s) hebdo x 14 semaines
    • Exercices
      1 Heure(s) hebdo x 14 semaines
    • Semestre
       Automne
    • Forme de l'examen
       Oral
    • Crédits
      3
    • Matière examinée
      Materials and technology of microfabrication
    • Cours
      2 Heure(s) hebdo x 14 semaines
    • Cours
      2 Heure(s) hebdo x 14 semaines
    • Exercices
      1 Heure(s) hebdo x 14 semaines
    • Exercices
      1 Heure(s) hebdo x 14 semaines

Semaine de référence

 LuMaMeJeVe
8-9     
9-10    BS270
10-11    
11-12    BS270
12-13     
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22     
 
      Cours
      Exercice, TP
      Projet, autre

légende

  • Semestre d'automne
  • Session d'hiver
  • Semestre de printemps
  • Session d'été
  • Cours en français
  • Cours en anglais
  • Cours en allemand