Microfabrication practicals

Summary

The goal of this course is to introduce students to the practical aspects of some basic micro-fabrication techniques.

Content

Keywords

photoresist, photolithography, lift-off, wet etching, photomask, sheet resistance, under etching, mask alignment, contact angle, film thickness, adhesion, run card, process flow, cleanroom, spin-coating, UV-exposure

Learning Prerequisites

Recommended courses

Micro-331

Learning Outcomes

By the end of the course, the student must be able to:

• Produce a run card
• Conduct experiments of photolithography and etching
• Sketch a process flow
• Interpret experimental data from measurements
• Coordinate tasks within a group
• Justify the need of cleanroom environment for micro- and nano-fabrications

Transversal skills

• Write a scientific or technical report.
• Evaluate one's own performance in the team, receive and respond appropriately to feedback.
• Give feedback (critique) in an appropriate fashion.

Teaching methods

Practical laboratory work in groups (4 students/group)

Series of experiments: some experiments will be done in CMI cleanroom, others in BM research laboratory and DLL

Lecture on introduction of cleanroom and some basic micofabrication methods related to the TP

Expected student activities

• Conduct experiments
• Use a lab notebook
• Explore lab facilities

1. Operate advanced equipments

Assessment methods

Individual: Class attendance, participation to all experiments, execution of specific work

Group: quality of scientific/technical report writing by the group related to each experiment.

Supervision

Resources

Moodle Link

• https://go.epfl.ch/MICRO-332