Scaling laws in micro & nanosystems

MICRO-470 / 2 credits

Teacher: Shea Herbert

Language: English

Summary

This class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles.

Content

The following topics are introduced and analytical modeling and scaling laws are discussed.

- Introduction to scaling laws: Scaling of classical mechanical systems, scaling of classical electrical systems, breakdown in scaling, quantum breakdown

-Thermal effects: conduction, convection, dynamics, breakdown, thermal micro-actuators.

- Mechanical scaling: Mass-spring model, mechanical noise, squeeze film effects. Lumped element

- Electrical scaling: electrostatic micro-actuators, electrostatic breakdown, tunnel sensors, coils and inductors, electromagnetic micro-actuators, magnetic beads.

- Microfluidics & Nanofluidics: Liquid flow, gas flow, mixing, surface tension, chromatography.

- Electrokinetics: Dielectriphoresis and electrophresis, EHD and MHD pumps, electrowetting.

Keywords

Micro-Electro-Mechanical Systems (MEMS)

Nano-Electro-Mechanical Systems (NEMS)

Scaling

Lumped Element Model (LEM)

Electrostatics

Electromagnetic

Microfluidic

Learning Prerequisites

Important concepts to start the course

Students MUST have strong background in microfabrication: we assume students undestand how MEMS are fabricated

solid grasp of electromagnetics, electrostatics, fluid dynamics
knowledge of analysis of electrical circuits

 

Learning Outcomes

By the end of the course, the student must be able to:

  • Analyze MEMS / NEMS design
  • Predict performance of MEMS
  • Exploit scaling laws in MEMS
  • Compare different MEMS principles and designs
  • Choose appropriate designs
  • Estimate performance of MEMS

Transversal skills

  • Plan and carry out activities in a way which makes optimal use of available time and other resources.
  • Respect the rules of the institution in which you are working.
  • Demonstrate the capacity for critical thinking
  • Use a work methodology appropriate to the task.

Assessment methods

oral exam

Resources

Moodle Link

In the programs

  • Semester: Fall
  • Exam form: Oral (winter session)
  • Subject examined: Scaling laws in micro & nanosystems
  • Courses: 2 Hour(s) per week x 14 weeks
  • Type: optional
  • Semester: Fall
  • Exam form: Oral (winter session)
  • Subject examined: Scaling laws in micro & nanosystems
  • Courses: 2 Hour(s) per week x 14 weeks
  • Type: optional

Reference week

Related courses

Results from graphsearch.epfl.ch.