MEMS sensors practicals

MICRO-503 / 3 credits

Teacher(s): Bertsch Arnaud, Boero Giovanni, Brugger Jürgen

Language: English

Withdrawal: It is not allowed to withdraw from this subject after the registration deadline.

Summary

The objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class.

Content

The practical is organized in several lab experiments dedicated to sensors:

  • Capacitive accelerometer
  • ISFET
  • Glucose sensor
  • piezoresistive pressure sensor • Electrokinetic chip
  • BOSCH sensor platform

 

 

Keywords

MEMS, microfabrication, sensors

Learning Prerequisites

Recommended courses

MICRO-331

Learning Outcomes

By the end of the course, the student must be able to:

  • Report
  • Conduct

Transversal skills

  • Demonstrate the capacity for critical thinking

Teaching methods

Practicals

Expected student activities

Collect data using different sensors

Understand sensing mechanism

Discuss collected data validity

Assessment methods

Based on work in the lab, anwer to questions during experimental sessions and quality of the report.

 

Supervision

Office hours Yes
Assistants Yes

Resources

Moodle Link

In the programs

  • Semester: Spring
  • Exam form: During the semester (summer session)
  • Subject examined: MEMS sensors practicals
  • TP: 3 Hour(s) per week x 14 weeks
  • TP: 3 Hour(s) per week x 14 weeks
  • Type: optional
  • Semester: Spring
  • Exam form: During the semester (summer session)
  • Subject examined: MEMS sensors practicals
  • TP: 3 Hour(s) per week x 14 weeks
  • TP: 3 Hour(s) per week x 14 weeks
  • Type: optional
  • Semester: Spring
  • Exam form: During the semester (summer session)
  • Subject examined: MEMS sensors practicals
  • TP: 3 Hour(s) per week x 14 weeks
  • TP: 3 Hour(s) per week x 14 weeks
  • Type: optional

Reference week

Monday, 8h - 11h: Exercise, TP

Wednesday, 11h - 14h: Exercise, TP

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