MEMS practicals II

MICRO-503 / 3 credits

Teacher(s): Bertsch Arnaud, Boero Giovanni, Brugger Jürgen

Language: English

Withdrawal: It is not allowed to withdraw from this subject after the registration deadline.

Summary

Objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class

Content

The practical is organized in several lab experiments.

The part I (winter semester) is dedicated to MEMS technology and MEMS simulation:

  • Finite element simulation of MEMS
  • Design of MEMS actuators
  • Fabrication of MEMS actuators
  • Caracterization of MEMS actuators
  • Noise in sensors

The part 2 (spring smester) is dedicated to sensors:

  • capacitive accelerometer
  • ISFET
  • Glucose sensor
  • piezoresistive pressure sensor • Electrokinetic chip 

 

Learning Outcomes

By the end of the course, the student must be able to:

  • Conduct an experiment
  • Report on experiments

Transversal skills

  • Demonstrate the capacity for critical thinking

Teaching methods

Practicals supervised by assistants 

 

Assessment methods

Based on work in the lab, anwer to questions during experimental sessions and quality of the report 

 

Supervision

Office hours Yes
Assistants Yes

Resources

Moodle Link

In the programs

  • Semester: Spring
  • Exam form: During the semester (summer session)
  • Subject examined: MEMS practicals II
  • TP: 3 Hour(s) per week x 14 weeks
  • TP: 3 Hour(s) per week x 14 weeks
  • Type: optional
  • Semester: Spring
  • Exam form: During the semester (summer session)
  • Subject examined: MEMS practicals II
  • TP: 3 Hour(s) per week x 14 weeks
  • TP: 3 Hour(s) per week x 14 weeks
  • Type: optional

Reference week

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