Advanced MEMS & microsystems

MICRO-534 / 3 credits

Language: English

Summary

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.

Content

Introduction: MEMS history, overview of the different types of MEMS and microsystems. Smart systems and 3D architectures. Current state of the art and trends at the academic and industrial levels. Market players and forecasts.

Transducing principles review: Detection (capacitive, piezoresistive, thermal) and actuation (thermal, electromagnetic, electrostatic, piezoelectric) principles of common MEMS devices.

MEMS Sensors: Introduction to motion sensors, 3D accelerometers, gyroscopes, pressure sensors, CMOS integration, multi-parametric sensor devices.

Actuators and Optical MEMS: Electrostatic and magnetic actuators; MOEMS in Consumer Electronics and Mobile (Micromirrors and Arrays, Scanners, Projectors, Displays)

Acoustic and Ultrasonic MEMS: Microphones, ultrasonic transducers, microspeakers, finger print sensors, piezoelectric MEMS

RF-MEMS: RF resonators for filters, frequency sources, time reference, and sensors.

NEMS: Introduction to Nano electro mechanical systems with particular emphasis on physical, chemical and biological sensors.

Thermal and Gas Sensors: Thermal flow sensors and accelerometers, capacitive, resistive, catalytic, FET, optical, and vapor/gas sensing devices.

Packaging: Die level vs. wafer level, packaging techniques, hermetic packaging, Through Silicon Vias (TSVs), 3D-integration.

Power MEMS: Overview of micro power sources, MEMS based energy harvesting devices

Industrial Seminars: Presenting the manufacturing and/or the implementation of MEMS devices into products

Keywords

MEMS/NEMS, Microsystems, Sensors and Actuators, Motion sensors, Actuators, Resonators, RF, Power, Optical, Polymer, Packaging.

Learning Prerequisites

Recommended courses

Sensors, Microfabrication Technologies, Physics of Semiconductors Devices

Learning Outcomes

By the end of the course, the student must be able to:

Explain the operation principles of advanced micro- and nanosystems
Describe the technology implemented in advanced micro- and nanosystems
Apply a concept of a micro- and nano-device into a real device considering the scaling laws and boundary conditions involved
Present the basics of implementation of MEMS into products
List the trends in the sensor and MEMS field

Transversal skills

Plan and carry out activities in a way which makes optimal use of available time and other resources.
Assess one's own level of skill acquisition, and plan their on-going learning goals.
Access and evaluate appropriate sources of information.

Teaching methods

Lectures, exercises, case studies, and seminars from the industry.

Expected student activities

Attendance at lectures and seminars

Reading written material

Solving the exercises

Assessment methods

Oral Examination at the end of the course (80%)

Oral presentation during the course (10%)

Reports on Industrial Seminars (10%)

Resources

Bibliography

Stephen Senturia (Editor in chief), MEMS Reference Shelf, Springer, 2010 and later.
Advanced Micro & NanoSystems, Wiley-VCH book series, 10 volumes, 2004 and later.
Thomas B. Jones, Nenad G. Nenadic, Electromechanics and MEMS, Cambridge University Press, 2013.
Gregory T.A. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, 1998, 911 pp.
Marc Madou, Fundamentals of Microfabrication and Nanotechnology, 3rd Edition, CRC Press, 2011.
Manouchehr E. Motamedi, MOEMS : Micro-opto-electro-mechanical systems, 2005.