Micro/Nanomechanical devices
Summary
In this course we will see an overview of the exciting field of Micro and Nanomechanical systems. We will go over the dfferent scaling laws that dominate the critical parameters, how size affects material properties, how these devices are manufactured, designed and later used.
Content
The idea of this course is to give a full view of the field of MEMS/NEMS mostly from a mechanical engineering standpoint. The course will be divided into the following sections:
- Introduction - Scaling laws: we will briefly see the where does the interest on this devices stems from. Reduction of dimensions not only to fit things into small places.
- Fabrication: Briefly, we will study how these devices are manufactured and how this departs from the more typical (classical) way of machining.
- Static deflection: due to forces, due to surface stress and/or temperature changes, and due to acceleration.
- Normal modes calculation: normal modes calculation (frequencies and mode shapes), mechanical nonlinearities.
- Material properties: We will analyze if and how material properties depend on the size of the fabricated device.
- Quality factor: The fundamental damping sources for small mechanical resonators will be analyzed, including thermoelastic damping, anchor losses, and stress-based dissipation dilution.
- Transduction: Since these devices are very small, the usual ways of detecting and creating motion cannot be applied anymore. We will briefly study the different options with their advantages and disadvantages.
- Noise: A study of how noise appears in these systems will be performed.
- Applications: The different applications of these devices will be briefly reviewed.
Keywords
- NEMS/MEMS
- Nanomechanics
- Quality factor
- Nonlinear dynamics
Learning Outcomes
- Explain the advantages of NEMS/MEMS in basis of scaling laws Analyze micro- and nano-mechanical systems Deduce behaviour of NEMS/MEMS both in static and dynamic mode Estimate nonlinear limits Estimate energy loss mechanisms Perform simulations to model these systems Recognize the different transduction mechanisms Analyze and design assemblies of simple mechanical elements in the framework of static and buckling, S2 Carry out Predict and optimize the vibration behaviour of multiple-degree-of-freedom or continuum systems, S3 Apply the models for the behaviour of composite materials to compute the respnse of simple composite structures, S7
- Participate and contribute to class discussions on scientific articles
Transversal skills
- Summarize an article or a technical report.
- Demonstrate the capacity for critical thinking
Teaching methods
- Ex catedra - recorded videos
- Exercises on the form of Scientific Works discussion
Assessment methods
- Evaluation during the semester based on class intervention (20%).
- In the exam period, written exam (80%).
Supervision
| Office hours | Yes |
| Assistants | Yes |
Resources
Bibliography
http://www.springer.com/us/book/9783319286891
(Available for free from EPFL - electronic copy)
Ressources en bibliothèque
Moodle Link
In the programs
- Semester: Fall
- Exam form: Written (winter session)
- Subject examined: Micro/Nanomechanical devices
- Courses: 2 Hour(s) per week x 14 weeks
- Exercises: 2 Hour(s) per week x 14 weeks
- Type: optional
- Semester: Fall
- Exam form: Written (winter session)
- Subject examined: Micro/Nanomechanical devices
- Courses: 2 Hour(s) per week x 14 weeks
- Exercises: 2 Hour(s) per week x 14 weeks
- Type: optional
- Semester: Fall
- Exam form: Written (winter session)
- Subject examined: Micro/Nanomechanical devices
- Courses: 2 Hour(s) per week x 14 weeks
- Exercises: 2 Hour(s) per week x 14 weeks
- Type: optional
- Semester: Fall
- Exam form: Written (winter session)
- Subject examined: Micro/Nanomechanical devices
- Courses: 2 Hour(s) per week x 14 weeks
- Exercises: 2 Hour(s) per week x 14 weeks
- Type: optional
- Semester: Fall
- Exam form: Written (winter session)
- Subject examined: Micro/Nanomechanical devices
- Courses: 2 Hour(s) per week x 14 weeks
- Exercises: 2 Hour(s) per week x 14 weeks
- Type: optional