Scaling in MEMS
Frequency
Every 2 years
Summary
This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.
Content
- Introduction to scaling laws: scaling of classical mechanical systems, scaling of classical electrical systems, breakdown in scaling, quantum breakdown.
- Thermal effects: conduction, convection, dynamics, breakdown, thermal micro-actuators, microreactors.
- Mechanical devices: mass-spring model, mechanical noise, squeeze film effects.
- Electrical devices: electrostatic micro-actuators, electrostatic breakdown, tunnel sensors, coils and inductors, electromagnetic micro-actuators, magnetostriction, magnetic beads.
- Microfluidics: liquid flow, gas flow, diffusion-mixing, surface tension, entropy trapping.
- Electrokinetics: dielectrophresis, EHD and MHD pumps, electrowetting, electroosmosis, capillary electrophoresis.
Keywords
Scaling laws, thermal micro-actuators, electromagnetic micro-actuators, microfluidics, electrokinetics
Learning Prerequisites
Recommended courses
- and/or microsystems and MEMS technologies
- Basics of physics
Learning Outcomes
By the end of the course, the student must be able to:
Transversal skills
- Plan and carry out activities in a way which makes optimal use of available time and other resources.
- Use a work methodology appropriate to the task.
- Communicate effectively with professionals from other disciplines.
- Give feedback (critique) in an appropriate fashion.
- Demonstrate the capacity for critical thinking
- Access and evaluate appropriate sources of information.
- Make an oral presentation.
Assessment methods
in-class presentation
In the programs
- Number of places: 13
- Exam form: Oral presentation (session free)
- Subject examined: Scaling in MEMS
- Lecture: 14 Hour(s)
- Type: optional
- Number of places: 13
- Exam form: Oral presentation (session free)
- Subject examined: Scaling in MEMS
- Lecture: 14 Hour(s)
- Type: optional