Fiches de cours

Thin film fabrication technologies

MSE-465

Enseignant(s) :

Michler Johann

Langue:

English

Summary

The students will learn about the essential chemical, thermodynamic and physical mechanisms governing thin film growth, about the most important process techniques and their typical features, including process-microstructure-relationships.

Content

Examples throughout the chapters mostly from Swiss companies on hard coatings, microelectronics, architectural glass, decorative coatings

Keywords

Plasma and thermal activation
Thin film growth models
Non-equilibrium and equilibrium processes
Ion bombardment & sputtering
Film morphology and micrstructure
Thin film characterisation methods
Mechanical properties
Industrial application of thin films

Learning Prerequisites

Important concepts to start the course

Basic courses on thermodynamics, physics, and chemistry

Learning Outcomes

By the end of the course, the student must be able to:

Transversal skills

Teaching methods

ex cathedra
exercices
demonstrations

Assessment methods

Written exam

Supervision

Assistants Yes

Resources

Bibliography

Copies of slides will be distributed via moodle
Recommended books

Moodle Link

Dans les plans d'études

Semaine de référence

 LuMaMeJeVe
8-9     
9-10  INM200  
10-11    
11-12    
12-13    
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22     
 
      Cours
      Exercice, TP
      Projet, autre

légende

  • Semestre d'automne
  • Session d'hiver
  • Semestre de printemps
  • Session d'été
  • Cours en français
  • Cours en anglais
  • Cours en allemand