MICRO-470 / 4 crédits

Enseignant(s): Renaud Philippe, Quack Niels, Shea Herbert

Langue: Anglais


Summary

This class combines an analytical and finite elements modeling (FEM) simulations approach to scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles.

Content

Keywords

Micro-Electro-Mechanical Systems (MEMS)

Nano-Electro-Mechanical Systems (NEMS)

Scaling

Finite Element Method (FEM)

Lumped Element Model (LEM)

Electrostatics

Electromagnetic

Fluidic

Cantilever

COMSOL

Learning Prerequisites

Required courses

Capteurs

Important concepts to start the course

solid grasp of electromagnetics, electrostatics, fluid dynamics

knowledge of analysis of electrical circuits

mastery of Matlab

Learning Outcomes

By the end of the course, the student must be able to:

  • Analyze MEMS designs
  • Exploit scaling laws in MEMS
  • Predict performance of MEMS devices analytically and by simulation
  • Take into consideration how different actuation principles scale with size
  • Compare different MEMS physical principles

Transversal skills

  • Plan and carry out activities in a way which makes optimal use of available time and other resources.
  • Use a work methodology appropriate to the task.
  • Communicate effectively, being understood, including across different languages and cultures.
  • Negotiate effectively within the group.

Teaching methods

ex-cathedra

problem sets

simulations tutorials

simulation projects

Expected student activities

attend all lectures

attend all FEM tutorial sessions

read assigned papers

do the problem sets

Assessment methods

project

oral exam

Dans les plans d'études

  • Semestre: Automne
  • Forme de l'examen: Oral (session d'hiver)
  • Matière examinée: Scaling laws & simulations in micro & nanosystems
  • Cours: 3 Heure(s) hebdo x 14 semaines
  • Exercices: 1 Heure(s) hebdo x 14 semaines
  • Semestre: Automne
  • Forme de l'examen: Oral (session d'hiver)
  • Matière examinée: Scaling laws & simulations in micro & nanosystems
  • Cours: 3 Heure(s) hebdo x 14 semaines
  • Exercices: 1 Heure(s) hebdo x 14 semaines
  • Semestre: Automne
  • Forme de l'examen: Oral (session d'hiver)
  • Matière examinée: Scaling laws & simulations in micro & nanosystems
  • Cours: 3 Heure(s) hebdo x 14 semaines
  • Exercices: 1 Heure(s) hebdo x 14 semaines
  • Semestre: Automne
  • Forme de l'examen: Oral (session d'hiver)
  • Matière examinée: Scaling laws & simulations in micro & nanosystems
  • Cours: 3 Heure(s) hebdo x 14 semaines
  • Exercices: 1 Heure(s) hebdo x 14 semaines

Semaine de référence

 LuMaMeJeVe
8-9     
9-10     
10-11     
11-12     
12-13     
13-14MAB111
BC07-08
    
14-15    
15-16    
16-17MAB111
BC07-08
    
17-18     
18-19     
19-20     
20-21     
21-22     

Lundi, 13h - 16h: Cours MAB111
BC07-08

Lundi, 16h - 17h: Exercice, TP MAB111
BC07-08