Fiches de cours

Nanofabrication with focused electron and ion beams

MSE-619

Lecturer(s) :

Hoffmann Patrik
Utke Ivo

Language:

English

Frequency

Every 2 years

Remark

Next time: 2021-22

Summary

Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.

Content

Keywords

FIB, FEB, nanofabrication, integrated setups for in-situ measurements (chemical, mechanical, structural, electronical) of nanostructures and their in-situ synthesis (gas injection)

Learning Prerequisites

Recommended courses

Physics and Chemistry at university level, general concepts of NanoSciences and Fabrication

Assessment methods

Exposé

In the programs

    • Semester
    • Exam form
       Oral presentation
    • Credits
      2
    • Subject examined
      Nanofabrication with focused electron and ion beams
    • Number of places
      20
    • Lecture
      12 Hour(s)
    • Exercises
      8 Hour(s)
    • Practical work
      8 Hour(s)
    • Semester
    • Exam form
       Oral presentation
    • Credits
      2
    • Subject examined
      Nanofabrication with focused electron and ion beams
    • Number of places
      20
    • Lecture
      12 Hour(s)
    • Exercises
      8 Hour(s)
    • Practical work
      8 Hour(s)

Reference week

 
      Lecture
      Exercise, TP
      Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German