MSE-619 / 2 crédits

Enseignant(s): Hoffmann Patrik, Utke Ivo

Langue: Anglais

Remark: Next time: 2021-22


Frequency

Every 2 years

Summary

Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.

Content

Keywords

FIB, FEB, nanofabrication, integrated setups for in-situ measurements (chemical, mechanical, structural, electronical) of nanostructures and their in-situ synthesis (gas injection)

Learning Prerequisites

Recommended courses

Physics and Chemistry at university level, general concepts of NanoSciences and Fabrication

Assessment methods

Exposé

Dans les plans d'études

  • Nombre de places: 20
  • Forme de l'examen: Exposé (session libre)
  • Matière examinée: Nanofabrication with focused electron and ion beams
  • Cours: 12 Heure(s)
  • Exercices: 8 Heure(s)
  • TP: 8 Heure(s)
  • Nombre de places: 20
  • Forme de l'examen: Exposé (session libre)
  • Matière examinée: Nanofabrication with focused electron and ion beams
  • Cours: 12 Heure(s)
  • Exercices: 8 Heure(s)
  • TP: 8 Heure(s)

Semaine de référence