MOOC: Micro and Nanofabrication (MEMS) - Fall
MICRO-621(a) / 1 crédit
Enseignant(s): Brugger Jürgen, Zhang Yujia
Langue: Anglais
Remark: September 30th to December 15th, 2025 - Online course (self-paced)
Frequency
Every year
Summary
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC will not only explain the basics of microfabrication but also show the practice through videos.
Content
Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.
In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment.
Course Syllabus
Week 1: MEMS and cleanroom introduction
Week 2: Chemical vapour deposition (CVD)
Week 3: Physical vapour deposition (PVD)
Week 4: Lithography
Week 5: Dry etching
Week 6: Wet etching
Week 7: Metrology
Keywords
microfabrication, cleanroom techniques, theory and visual demonstration by video sequences, quizzes.
Learning Prerequisites
Required courses
basics of physics and chemistry
Recommended courses
none
Learning Outcomes
By the end of the course, the student must be able to:
- Select appropriately the correct fabrication process for a specific micro-device or microsystem
- Establish the workflow for the cleanroom processes
- Identify how physical and chemical phenomena govern miniaturized systems for various applications
- Manage Resource planning for a given microsystem fabrication
- Select appropriately the correct fabrication process for a specific micro-device or microsystem
- Establish the workflow for the cleanroom processes
- Identify how physical and chemical phenomena govern miniaturized systems for various applications
- Manage resource planning for a given microsystem fabrication
Teaching methods
The course is largely self-paced following the MOOC with the embedded training quizzes.
Expected student activities
In addition to the MOOC learning, the teachers will launch MOODLE based activities, such as graded quiz, reading assignments, and group activiies.
We will form groups of PhD students to work together on process flow related microfabrication challenges. The final assessment is a mix of graded quiz and group-based workshop activities.
Assessment methods
Examination:
Graded quizzes and group-based workshop activities done for the class at the end of the course.
If for some reason a student cannot take part in a group-based workshop, an indivual oral exam can be arranged (it requires a justification).
Resources
Bibliography
- "Fundamentals of Microfabrication and Nanotechnology, Volume II, Manufacturing Techniques for Microfabrication and Nanotechnology", Marc J. Madou, CRC Press
- "Introduction to Microfabrication, Second Edition", Sami Franssila, Wiley
Ressources en bibliothèque
- Introduction to microfabrication / Franssila
- Fundamentals of microfabrication : the science of miniaturization / Madou
Notes/Handbook
Moodle Link
Dans les plans d'études
- Forme de l'examen: Oral (session libre)
- Matière examinée: MOOC: Micro and Nanofabrication (MEMS) - Fall
- Cours: 14 Heure(s)
- Exercices: 14 Heure(s)
- Type: optionnel
- Forme de l'examen: Oral (session libre)
- Matière examinée: MOOC: Micro and Nanofabrication (MEMS) - Fall
- Cours: 14 Heure(s)
- Exercices: 14 Heure(s)
- Type: optionnel