MICRO-621 / 1 crédit

Enseignant(s): Brugger Jürgen, Gijs Martinus

Langue: Anglais

Remark: September 20th to November 21st, 2021 - Online / Self-paced


Summary

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC will not only explain the basics of microfabrication but also show the practice through videos.

Content

Keywords

microfabrication, cleanroom techniques, theory and visual demonstration by video sequences, quizzes.

Learning Prerequisites

Required courses

basics of physics and chemistry

Recommended courses

none

Learning Outcomes

By the end of the course, the student must be able to:

  • Select appropriately the correct fabrication process for a specific micro-device or microsystem
  • Establish the workflow for the cleanroom processes
  • Identify how physical and chemical phenomena govern miniaturized systems for various applications
  • Manage resource planning for a given microsystem fabrication

Assessment methods

Examination:

Individual oral examinations
held on November 25th and December 2nd, 2021
(15h to 17h)

Dans les plans d'études

  • Forme de l'examen: Oral (session libre)
  • Matière examinée: MOOC: Micro and Nanofabrication (MEMS)
  • Cours: 14 Heure(s)
  • Exercices: 14 Heure(s)
  • Forme de l'examen: Oral (session libre)
  • Matière examinée: MOOC: Micro and Nanofabrication (MEMS)
  • Cours: 14 Heure(s)
  • Exercices: 14 Heure(s)

Semaine de référence