MICRO-332 / 2 crédits

Enseignant(s): Brugger Jürgen, Gijs Martinus, Sayah Abdeljalil

Langue: Anglais

Withdrawal: It is not allowed to withdraw from this subject after the registration deadline.


Summary

The goal of this course is to introduce students to the practical aspects of some basic micro-fabrication techniques.

Content

Keywords

photoresist, photolithography, lift-off, wet etching, photomask, sheet resistance, under etching, mask alignment, contact angle, film thickness, adhesion, run card, process flow, cleanroom, spin-coating, UV-exposure

Learning Prerequisites

Recommended courses

Micro-331

Learning Outcomes

By the end of the course, the student must be able to:

  • Produce a run card
  • Conduct experiments of photolithography and etching
  • Sketch a process flow
  • Interpret experimental data from measurements
  • Coordinate tasks within a group
  • Justify the need of cleanroom environment for micro- and nano-fabrications

Transversal skills

  • Write a scientific or technical report.
  • Evaluate one's own performance in the team, receive and respond appropriately to feedback.
  • Give feedback (critique) in an appropriate fashion.

Teaching methods

Practical laboratory work in groups (4 students/group)

Series of experiments: some experiments will be done in CMI cleanroom, others in BM research laboratory and DLL

Lecture on introduction of cleanroom and some basic micofabrication methods related to the TP

 

Expected student activities

  • Conduct experiments
  • Use a lab notebook
  • Explore lab facilities
  1. Operate advanced equipments

Assessment methods

Individual: Class attendance, participation to all experiments, execution of specific work

Group: quality of scientific/technical report writing by the group related to each experiment.

 

Supervision

Office hours No
Assistants Yes
Forum Yes

Dans les plans d'études

  • Semestre: Automne
  • Forme de l'examen: Pendant le semestre (session d'hiver)
  • Matière examinée: Microfabrication practicals
  • TP: 2 Heure(s) hebdo x 14 semaines
  • TP: 2 Heure(s) hebdo x 14 semaines
  • TP: 2 Heure(s) hebdo x 14 semaines
  • TP: 2 Heure(s) hebdo x 14 semaines

Semaine de référence

 LuMaMeJeVe
8-9     
9-10     
10-11     
11-12     
12-13     
13-14GRA332
MED31119
    
14-15    
15-16GRA332
MED31119
    
16-17    
17-18GRA332
MED31119
GRA332
MED31119
   
18-19   
19-20     
20-21     
21-22     

Mardi, 17h - 19h: Exercice, TP GRA332
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Lundi, 13h - 15h: Exercice, TP GRA332
MED31119

Lundi, 15h - 17h: Exercice, TP GRA332
MED31119

Lundi, 17h - 19h: Exercice, TP GRA332
MED31119