MEMS practicals II
MICRO-503 / 2 crédits
Enseignant(s): Bertsch Arnaud, Boero Giovanni, Brugger Jürgen
Langue: Anglais
Withdrawal: It is not allowed to withdraw from this subject after the registration deadline.
Summary
Objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class
Content
The practical is organized in several lab experiments.
The part I (winter semester) is dedicated to MEMS technology and MEMS simulation:
- Finite element simulation of MEMS
- Design of MEMS actuators
- Fabrication of MEMS actuators
- Caracterization of MEMS actuators
- Noise in sensors
The part 2 (spring smester) is dedicated to sensors:
- capacitive accelerometer
- ISFET
- Glucose sensor
- piezoresistive pressure sensor • Electrokinetic chip
Learning Outcomes
By the end of the course, the student must be able to:
- Conduct an experiment
- Report on experiments
Transversal skills
- Demonstrate the capacity for critical thinking
Teaching methods
Practicals supervised by assistants
Assessment methods
Based on work in the lab, anwer to questions during experimental sessions and quality of the report
Supervision
| Office hours | Yes |
| Assistants | Yes |
Dans les plans d'études
- Semestre: Printemps
- Forme de l'examen: Pendant le semestre (session d'été)
- Matière examinée: MEMS practicals II
- TP: 2 Heure(s) hebdo x 14 semaines
- TP: 2 Heure(s) hebdo x 14 semaines
- Semestre: Printemps
- Forme de l'examen: Pendant le semestre (session d'été)
- Matière examinée: MEMS practicals II
- TP: 2 Heure(s) hebdo x 14 semaines
- TP: 2 Heure(s) hebdo x 14 semaines
Semaine de référence
| Lu | Ma | Me | Je | Ve | |
| 8-9 | |||||
| 9-10 | |||||
| 10-11 | |||||
| 11-12 | |||||
| 12-13 | |||||
| 13-14 | |||||
| 14-15 | |||||
| 15-16 | |||||
| 16-17 | |||||
| 17-18 | |||||
| 18-19 | |||||
| 19-20 | |||||
| 20-21 | |||||
| 21-22 |
Légendes:
Cours
Exercice, TP
Projet, autre
Lundi, 8h - 10h: Exercice, TP
Mercredi, 11h - 13h: Exercice, TP