Thin film fabrication technologies
Summary
The students will learn about the essential chemical, thermodynamic and physical mechanisms governing thin film growth, about the most important process techniques and their typical features, including process-microstructure-film properties relationships.
Content
- Introduction (applications, importance, history, overview, vacuum science and technology)
- Major deposition methods with examples and typical applications: evaporation; plasmas, ion beam processing, sputtering; chemical vapor deposition; atomic layer deposition
- Nucleation and growth models, epitaxy
- Film morphology and microstructure
- Interdiffusion, reactions and transformations
- Characterisation techniques of thin films and surfaces
- Mechanical properties of thin films
Examples throughout the chapters mostly from Swiss companies on hard coatings, microelectronics, architectural glass, decorative coatings
Keywords
Plasma and thermal activation
Thin film growth models
Non-equilibrium and equilibrium processes
Ion bombardment & sputtering
Film morphology and micrstructure
Thin film characterisation methods
Mechanical properties
Industrial application of thin films
Learning Prerequisites
Important concepts to start the course
Basic courses on thermodynamics, physics, and chemistry
Learning Outcomes
By the end of the course, the student must be able to:
- Describe thin film growth methods
- Explain main mechanisms
- Propose methods according to requirements
- Theorize on the effect of process parameters
- Describe thin film characterisation methods
- Propose thin film characterisation methods according to damage cases or quality control requirement
Transversal skills
- Assess one's own level of skill acquisition, and plan their on-going learning goals.
- Access and evaluate appropriate sources of information.
Teaching methods
ex cathedra
exercices
demonstrations
Assessment methods
oral exam
Supervision
| Assistants | Yes |
Resources
Bibliography
Copies of slides, the recordings of the lectures, and a set questions and answers for each course module will be distributed via moodle.
Recommended books
Moodle Link
In the programs
- Semester: Spring
- Exam form: Oral (summer session)
- Subject examined: Thin film fabrication technologies
- Lecture: 2 Hour(s) per week x 14 weeks
- Semester: Spring
- Exam form: Oral (summer session)
- Subject examined: Thin film fabrication technologies
- Lecture: 2 Hour(s) per week x 14 weeks