MICRO-606 / 1 credit

Teacher(s): Renaud Philippe, Shea Herbert

Language: English

Remark: Next time: September 13 to 16, 2021


Frequency

Every 2 years

Summary

This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.

Content

Keywords

Scaling laws, thermal micro-actuators, electromagnetic micro-actuators, microfluidics, electrokinetics

Learning Prerequisites

Recommended courses

  • and/or microsystems and MEMS technologies
  • Basics of physics

In the programs

  • Exam form: Oral presentation (session free)
  • Subject examined: Scaling in MEMS
  • Lecture: 14 Hour(s)
  • Exam form: Oral presentation (session free)
  • Subject examined: Scaling in MEMS
  • Lecture: 14 Hour(s)

Reference week

 MoTuWeThFr
8-9     
9-10     
10-11     
11-12     
12-13     
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22