MICRO-605 / 1 credit

Teacher: Ataman Caglar

Language: English

Remark: 25 to 28 November 2025 (Microcity, Neuchâtel)


Frequency

Every 2 years

Summary

Micro-optics and Optical MEMS let us shape light with unmatched precision and speed. From fiber networks to LIDAR, they drive innovation in compact systems. MICRO 605 takes you from core principles to breakthrough applications in this fast-evolving field.

Content

Micro-optics and Optical MEMS refer to a wide range of devices and methods that allow us to manipulate light at the wavelength scale with unprecedented precision and speed. Emerging from modern microsystems technology, they are at the heart of countless compact yet versatile optoelectronic systems such as fiber optic telecommunications networks, LIDAR, adaptive optics and endomicroscopy. MICRO605 is a comprehensive tour of the rich world of passive and active micro-optics, covering the subject from its fundamentals to its most exciting applications.

 

1.    Optics at the micro-scale: An introduction (0.5 hours)
2.    Fundamental optical concepts (2.5 hours)
2.1.    Gaussian beam propagation
2.2.    Scalar diffraction theory
2.3.    Interference and interferograms
3.    Micro-optics: Devices and applications (3 hours)
3.1.    Refractive and diffractive microlenses
3.2.    Diffraction gratings and diffractive-optical elements
3.3.    Fabrication of micro-optics
4.    Optical MEMS: Devices (3 hours)
4.1.    From static to dynamic
4.2.    Scanning and pointing micromirrors 
4.3.    Tunable diffraction gratings
4.4.    Tunable micro-resonators
5.    MOEMS Applications (3 hours)
5.1.    Display and imaging systems
5.2.    Optical communications
5.3.    Scientific instrumentation 
6.    Emerging topics (0.5 hour)


EXAM:
Written report on a design study

Learning Prerequisites

Recommended courses

Basic knowledge of physics and mathematics
MICRO-621: Micro and Nanofabrication (MEMS)
MICRO-606: Scaling in MEMS

 

Resources

Bibliography

Micro-Optics: Elements, Systems and Applications, edited by Hans Peter Herzig
Fundamentals of Micro-Optics, by Hans Zappe
Optical MEMS, Nanophotonics, and Their Applications, edited by Guangya Zhou & Chengkuo Lee
MOEMS: Micro-Opto-Electro-Mechanical Systems, by Manouchehr E. Motamedi
Microsystem Design, by Stephen Senturia
Fundamentals of Microfabrication, by Marc Madou
Micro Electro Mechanical System Design, by J. Allen
Analysis and Design Principles of MEMS Devices, by Minhang Bao

Ressources en bibliothèque

Moodle Link

In the programs

  • Number of places: 20
  • Exam form: Written (session free)
  • Subject examined: Optical MEMS and micro-optics
  • Courses: 14 Hour(s)
  • Type: optional
  • Number of places: 20
  • Exam form: Written (session free)
  • Subject examined: Optical MEMS and micro-optics
  • Courses: 14 Hour(s)
  • Type: optional

Reference week

Related courses

Results from graphsearch.epfl.ch.