MSE-619 / 2 credits

Teacher(s): Hoffmann Patrik, Utke Ivo

Language: English

Remark: Next time: 2021-22


Frequency

Every 2 years

Summary

Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.

Content

Keywords

FIB, FEB, nanofabrication, integrated setups for in-situ measurements (chemical, mechanical, structural, electronical) of nanostructures and their in-situ synthesis (gas injection)

Learning Prerequisites

Recommended courses

Physics and Chemistry at university level, general concepts of NanoSciences and Fabrication

Assessment methods

Exposé

In the programs

  • Exam form: Oral presentation (session free)
  • Subject examined: Nanofabrication with focused electron and ion beams
  • Lecture: 12 Hour(s)
  • Exercises: 8 Hour(s)
  • Practical work: 8 Hour(s)
  • Exam form: Oral presentation (session free)
  • Subject examined: Nanofabrication with focused electron and ion beams
  • Lecture: 12 Hour(s)
  • Exercises: 8 Hour(s)
  • Practical work: 8 Hour(s)

Reference week

 MoTuWeThFr
8-9     
9-10     
10-11     
11-12     
12-13     
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22