Microfabrication II

MICRO-304 / 2 credits

Teacher(s): Brugger Jürgen, Zhang Yujia

Language: English

Summary

This course focuses on advanced process technologies and microsystem integration strategies. Students will deepen their understanding of selected state-of-the-art fabrication techniques and learn how to design, optimise, and evaluate complete fabrication workflows for complex microsystems.

Content

Through a series of case studies, students will explore process integration challenges associated with different application domains, including microelectromechanical systems (MEMS), microfluidics, photonic devices, bio-integrated systems, sensors, and advanced electronic platforms. Emphasis is placed on process flow development, technology selection, materials compatibility, design trade-offs, and manufacturing constraints.

Advanced technology content

  1. Advanced lithography techniques
  2. Atomic Layer Deposition (ALD) and emerging thin-film technologies
  3. Advanced etching and pattern transfer methods
  4. Wafer bonding and heterogeneous integration (if time allows)
  5. Flexible and hybrid integration approaches (if time allows)
  6. Advanced metrology and process control
  7. Packaging and assembly technologies
  8. Selected emerging fabrication techniques (topic-dependent)

Process flow design and integration

  1. Process flow development methodology
  2. Materials compatibility and process constraints
  3. Design rules and fabrication trade-offs
  4. Yield considerations and manufacturability
  5. Process integration strategies

Application case studies

  1. MEMS and mechanical microsystems
  2. Microfluidic systems
  3. Photonic microsystems
  4. Bio-integrated and implantable systems
  5. Sensor platforms
  6. Flexible and wearable technologies
  7. Advanced electronic systems

 

Keywords

  • Advanced microfabrication
  • Process integration
  • Fabrication workflows
  • MEMS
  • Microfluidics
  • Photonic systems
  • Heterogeneous integration
  • Microsystems engineering
  • Sensors and bioelectronics

Learning Prerequisites

Required courses

Successful completion of the introductory micro- and nanofabrication course (Micro-303) or equivalent knowledge of fundamental cleanroom processes.

Recommended courses

  • Micro- and nanofabrication fundamentals (Micro-303)
  • Microfabrication practicals (Micro-332)
  • Physics
  • Materials science
  • Electronics
  • Microsystems engineering

Learning Outcomes

By the end of the course, the student must be able to:

  • Explain • Explain the operating principles and applications of selected advanced microfabrication techniques.
  • Compare • Compare fabrication approaches and assess their suitability for specific microsystem applications.
  • Develop • Develop complete fabrication workflows for complex devices involving multiple materials and functionalities.
  • Analyze • Analyse process integration challenges, including materials compatibility, sequence optimisation, and manufacturing constraints.
  • Interpret • Critically interpret and discuss process flows presented in the scientific literature, industrial practice, or AI-generated sequences.
  • Present • Present and justify fabrication concepts and process integration strategies effectively to peers and experts.
  • Justify

Teaching methods

  • Communicate technical concepts through oral presentations and structured discussions.

Expected student activities

Students are expected to:

  • Review prerequisite material and participate actively in recap sessions.
  • Prepare for and engage in student-led tutorials.
  • Analyse representative microsystems and propose corresponding fabrication strategies.
  • Develop complete process flows for selected case studies.
  • Discuss alternative fabrication approaches and manufacturing trade-offs.
  • Use the dedicated RAG Tutor bot containing cleanroom-specific process knowledge and in-house fabrication data.
  • Participate actively in discussions and presentations.

Assessment methods

  • 4 student-led tutorial participation and quality of contributions: 25% of the final grade.
  • Design exercises and process flow assignments: 25% of the final grade.
  • Final written examination or project evaluation: 50% of the final grade.

Supervision

Office hours Yes
Assistant.e.s Yes
Forum Yes

Resources

Notes/Handbook

  • MOODLE platform
  • Course notes and handouts
  • Process flow examples and design templates
  • MOOC materials
  • Guest lecture resources
  • Dedicated RAG Tutor bot

Websites

Moodle Link

In the programs

  • Semester: Spring
  • Exam form: Written (summer session)
  • Subject examined: Microfabrication II
  • Courses: 2 Hour(s) per week x 14 weeks
  • Exercises: 1 Hour(s) per week x 14 weeks
  • Type: mandatory

Reference week

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