Micro/Nanomechanical devices

ME-426 / 4 credits

Teacher: Villanueva Torrijo Luis Guillermo

Language: English

Summary

In this course we will see an overview of the exciting field of Micro and Nanomechanical systems. We will go over the dfferent scaling laws that dominate the critical parameters, how size affects material properties, how these devices are manufactured, designed and later used.

Content

The idea of this course is to give a full view of the field of MEMS/NEMS mostly from a mechanical engineering standpoint. The course will be divided into the following sections:

  1. Introduction - Scaling laws: we will briefly see the where does the interest on this devices stems from. Reduction of dimensions not only to fit things into small places.
  2. Fabrication: Briefly, we will study how these devices are manufactured and how this departs from the more typical (classical) way of machining.
  3. Static deflection: due to forces, due to surface stress and/or temperature changes, and due to acceleration.
  4. Normal modes calculation: normal modes calculation (frequencies and mode shapes), mechanical nonlinearities.
  5. Material properties: We will analyze if and how material properties depend on the size of the fabricated device.
  6. Quality factor: The fundamental damping sources for small mechanical resonators will be analyzed, including thermoelastic damping, anchor losses, and stress-based dissipation dilution.
  7. Transduction: Since these devices are very small, the usual ways of detecting and creating motion cannot be applied anymore. We will briefly study the different options with their advantages and disadvantages.
  8. Noise: A study of how noise appears in these systems will be performed.
  9. Applications: The different applications of these devices will be briefly reviewed.

 

 

Keywords

  • NEMS/MEMS
  • Nanomechanics
  • Quality factor
  • Nonlinear dynamics

Learning Outcomes

By the end of the course, the student must be able to:

  • Explain the advantages of NEMS/MEMS in basis of scaling laws
  • Analyze micro- and nano-mechanical systems
  • Deduce behaviour of NEMS/MEMS both in static and dynamic mode
  • Estimate nonlinear limits
  • Estimate energy loss mechanisms
  • Perform simulations to model these systems
  • Recognize the different transduction mechanisms
  • Analyze and design assemblies of simple mechanical elements in the framework of static and buckling, S2
  • Carry out Predict and optimize the vibration behaviour of multiple-degree-of-freedom or continuum systems, S3
  • Apply the models for the behaviour of composite materials to compute the respnse of simple composite structures, S7

Transversal skills

  • Make an oral presentation.
  • Summarize an article or a technical report.
  • Write a scientific or technical report.
  • Evaluate one's own performance in the team, receive and respond appropriately to feedback.
  • Identify the different roles that are involved in well-functioning teams and assume different roles, including leadership roles.

Teaching methods

  • Ex catedra - recorded videos
  • Hands-on exercises

Assessment methods

  • Evaluation during the semester based on graded homework (50%).
  • In the exam period, written exam (50%).

 

Supervision

Office hours Yes
Assistants Yes
Forum Yes

Resources

Bibliography

http://www.springer.com/us/book/9783319286891

(Available for free from EPFL - electronic copy)

Ressources en bibliothèque

Moodle Link

In the programs

  • Semester: Fall
  • Exam form: Written (winter session)
  • Subject examined: Micro/Nanomechanical devices
  • Lecture: 2 Hour(s) per week x 14 weeks
  • Exercises: 2 Hour(s) per week x 14 weeks
  • Type: optional
  • Semester: Fall
  • Exam form: Written (winter session)
  • Subject examined: Micro/Nanomechanical devices
  • Lecture: 2 Hour(s) per week x 14 weeks
  • Exercises: 2 Hour(s) per week x 14 weeks
  • Type: optional
  • Semester: Fall
  • Exam form: Written (winter session)
  • Subject examined: Micro/Nanomechanical devices
  • Lecture: 2 Hour(s) per week x 14 weeks
  • Exercises: 2 Hour(s) per week x 14 weeks
  • Type: optional
  • Semester: Fall
  • Exam form: Written (winter session)
  • Subject examined: Micro/Nanomechanical devices
  • Lecture: 2 Hour(s) per week x 14 weeks
  • Exercises: 2 Hour(s) per week x 14 weeks
  • Type: optional
  • Semester: Fall
  • Exam form: Written (winter session)
  • Subject examined: Micro/Nanomechanical devices
  • Lecture: 2 Hour(s) per week x 14 weeks
  • Exercises: 2 Hour(s) per week x 14 weeks
  • Type: optional

Reference week

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