Introduction to SEM and FIB microanalysis
MSE-675 / 2 credits
Teacher(s): Herrmann Lorenz, Maeder Xavier, Michler Johann
Language: English
Remark: Next time: November 18 to 21, 2025
Frequency
Every year
Summary
Modern Scanning Electron Microscopes, when combined with focused ion beams (Dual beam FIBs), provide a larger number of multi-modal imaging and different analytical methods. The course format consists of introductory lectures, lectures on advanced techniques and practical work.
Content
SEM and FIB: Instrumentation and Principles
SEM+FIB: mode of operation
SEM+FIB: Image formation and interpretation
FIB: Milling and Fabrication
Elemental analyses with FIB-TOFSIMS
Elemental analyses with EDS
Elemental analyses with WDS and µ-XRF
Introduction to Auger Electron Spectroscopy (AES)
Introduction to Atom Probe Tomography (APT)
Demonstration and teaching in front of the SEM
Introduction to ECCI
Introduction to EBSD
EBSD techniques: Texture, advanced EBSD indexing, 3D-EBSD, TKD
Advanced EBSD techniques: HR-EBSD
Advanced diffraction technique in SEM: LEND
Introduction to TEM: TEM vs SEM for imaging and diffraction
Advanced SEM in-situ techniques
Note
The course will take place at Empa in Thun.
Keywords
SEM, FIB
Learning Prerequisites
Required courses
This course is open to participants with a basic background in materials science, mechanical engineering, chemical engineering, micro-technology or physics. It is taught in English and is limited to a maximum of 16 participants.
Assessment methods
written exam at the end of the course
In the programs
- Number of places: 16
- Exam form: Written (session free)
- Subject examined: Introduction to SEM and FIB microanalysis
- Courses: 27 Hour(s)
- TP: 2 Hour(s)
- Type: optional