Coursebooks

Introduction to Finite Element Modelling in Microsystems

MICRO-628

Lecturer(s) :

Quack Niels

Language:

English

Frequency

Every year

Remarque

From: 22.08.2019 to: 23.08.2019

Summary

Introduction to Finite Element Modelling with hands-on examples of typical microsystems.

Content

The following topics are introduced and hands-on finite modeling is performed using COMSOL Multiphysics for typical microsystems.

 

Introduction to FEM: Material Models, Anisotropy, Convergence, Nonlinearity, Mesh, Study Types
Structural Mechanics: Modal Analysis, Thin Films, Stress, Curvature
Thermal FEM
Electro-Thermo-Mechanical Coupling
Electrostatic FEM: Fields, Boundary Conditions, Parallel Plate Actuator, Voltage-Displacement
Introduction to Damping Effects and Microfluidics

 

After the lectures and exercices, the student will develop an own finite element model and present the results.

Keywords

MEMS, Finite Element Modeling FEM

Learning Outcomes

By the end of the course, the student must be able to:

In the programs

Reference week

 
      Lecture
      Exercise, TP
      Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German