Coursebooks

Fundamentals of microfabrication

MICRO-331

Lecturer(s) :

Brugger Jürgen
Gijs Martinus

Language:

English

Summary

The student will learn the fundamental aspects of modern micro and nanofabrication as they are being used in modern clean room facilities. The course focuses mainly on silicon based technologies but introduces also other materials of interest for micro and nanosystems.

Supervision

Office hours No
Assistants Yes
Forum Yes

In the programs

Reference week

 MoTuWeThFr
8-9  CE2CM4 
9-10   
10-11     
11-12     
12-13     
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22     
 
      Lecture
      Exercise, TP
      Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German