MICRO-534 / 3 credits

Teacher(s): Quack Niels, Briand Danick

Language: English


Summary

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.

Content

Keywords

MEMS/NEMS, Microsystems, Sensors and Actuators, Motion sensors, Actuators, Resonators, RF, Power, Optical, Polymer, Packaging.

Learning Prerequisites

Recommended courses

Sensors, Materials and Technology of Microfabrication I&II

Learning Outcomes

By the end of the course, the student must be able to:

  • Explain the operation principles of advanced micro- and nanosystems
  • Describe the technology implemented in advanced micro- and nanosystems
  • Apply a concept of a micro- and nano-device into a real device considering the scaling laws and boundary conditions involved
  • Present the basics of implementation of MEMS into products
  • List the trends in the sensor and MEMS field

Transversal skills

  • Plan and carry out activities in a way which makes optimal use of available time and other resources.
  • Assess one's own level of skill acquisition, and plan their on-going learning goals.
  • Access and evaluate appropriate sources of information.

Teaching methods

Lectures, exercises, case studies, and seminars from the industry.

Expected student activities

Attendance at lectures and seminars

Reading written material

Solving the exercises

Assessment methods

Oral Examination at the end of the course

Oral presentation during the course

Reports on Industrial Seminars

 

Resources

Bibliography

  • Stephen Senturia (Editor in chief), MEMS Reference Shelf, Springer, 2010 and later.
  • Advanced Micro & NanoSystems, Wiley-VCH book series, 10 volumes, 2004 and later.
  • Thomas B. Jones, Nenad G. Nenadic, Electromechanics and MEMS, Cambridge University Press, 2013.
  • Gregory T.A. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, 1998, 911 pp.
  • Marc Madou, Fundamentals of Microfabrication and Nanotechnology, 3rd Edition, CRC Press, 2011.
  • Manouchehr E. Motamedi, MOEMS : Micro-opto-electro-mechanical systems, 2005.

Ressources en bibliothèque

In the programs

  • Semester: Spring
  • Exam form: Oral (summer session)
  • Subject examined: Advanced MEMS & microsystems
  • Lecture: 3 Hour(s) per week x 14 weeks
  • Semester: Spring
  • Exam form: Oral (summer session)
  • Subject examined: Advanced MEMS & microsystems
  • Lecture: 3 Hour(s) per week x 14 weeks
  • Semester: Spring
  • Exam form: Oral (summer session)
  • Subject examined: Advanced MEMS & microsystems
  • Lecture: 3 Hour(s) per week x 14 weeks
  • Semester: Spring
  • Exam form: Oral (summer session)
  • Subject examined: Advanced MEMS & microsystems
  • Lecture: 3 Hour(s) per week x 14 weeks

Reference week

 MoTuWeThFr
8-9     
9-10     
10-11     
11-12     
12-13     
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22