Fiches de cours 2017-2018

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Scaling laws in micro- and nanosystems

MICRO-430

Enseignant(s) :

Renaud Philippe
Shea Herbert

Langue:

English

Summary

Overview of the dominant physical effects and scaling of laws that applies when downsizing sensors and actuators in microsystems. Show the limits and breakdown of scaling laws in miniaturization. Several examples taken from research articles are presented for each case.

Content

Learning Prerequisites

Recommended courses

Sensors (MICRO-330) very strongly recommended, and content will be assumed to be mastered.

Important concepts to start the course

Students must have a solid mastery of physics (mechanics, heat transfer, eletromagnetism, fluid dynamics), chemistry, and be familiar with MEMS fundamentals (concepts, basic microfabrication) and miniaturized sensors.

Learning Outcomes

By the end of the course, the student must be able to:

Transversal skills

Teaching methods

ex cathedra teaching

Expected student activities

self study, read reference book chapters and papers

Assessment methods

oral exam

Resources

Ressources en bibliothèque

Prerequisite for

MEMS reliability

Advanced MEMS

Dans les plans d'études

Semaine de référence

 LuMaMeJeVe
8-9     
9-10     
10-11     
11-12     
12-13     
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22     
En construction
 
      Cours
      Exercice, TP
      Projet, autre

légende

  • Semestre d'automne
  • Session d'hiver
  • Semestre de printemps
  • Session d'été
  • Cours en français
  • Cours en anglais
  • Cours en allemand