Fiches de cours 2018-2019

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Scaling in MEMS

MICRO-606

Lecturer(s) :

Renaud Philippe
Shea Herbert

Language:

English

Frequency

Every 2 years

Remarque

Next time in Summer 2019

Summary

This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.

Content

 

Keywords

Scaling laws, thermal micro-actuators, electromagnetic micro-actuators, microfluidics, electrokinetics

Learning Prerequisites

Recommended courses

In the programs

Reference week

 
      Lecture
      Exercise, TP
      Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German