Fiches de cours 2017-2018

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RF MEMS for communications applications

MICRO-711

Lecturer(s) :

Fernandez-Bolanos Badia Montserrat
Ionescu Mihai Adrian

Language:

English

Frequency

Every 2 years

Remarque

Next time in Spring 2018

Summary

This course provides an overview of RF MEMS/NEMS switches, passives, resonators, phase shifters and filters including hybrid devices (resonant-gate MOS transistor), carbon and phase-change materials, heterogeneous integration and a tutorial in S-parameters measurements and calibration techniques.

Content

' RF MEMS switches: capacitive, contact, technology, electromechanical and RF design and modelling, figures of merit, reliability and advanced packaging.

' RF MEMS passives for reconfigurable and/or tunable transceiver/receiver architectures. Technology, CMOS compatibility and heterogeneous integration. Through silicon vias technology for 3D RF inductors.

' MEMS resonators and FBARs for essential circuit functions: filtering, mixing and frequency reference. Design, technology and Figures of merit. Resonator arrays and techniques for improvement of motional resistance. Resonant-gate MOS transistor: (i) hybrid MEMS-MOS switch, (ii) hybrid MEMS-MOS resonator with intrinsic gain and (iii) 1T memory cell.

' RF MEMS Phase shitfters and band-pass and band-stop filters: types, technology and design

' Carbon Nanotubes and Graphene based RF NEMS

' Phase change materials as Vanadium dioxide for communication applications

' Tutorial in S-parameters measurements and calibration techniques (SOLT and TRL)

Keywords

RF MEMS, MEMS passives, MEMS resonators, FBAR, NEMS, Resonant-gate transistor

Learning Prerequisites

Recommended courses

Basic lectures in physics and electronics

Resources

Websites

In the programs

  • Microsystems and Microelectronics (edoc), 2017-2018
    • Semester
    • Exam form
      Written
    • Credits
      1
    • Subject examined
      RF MEMS for communications applications
    • Lecture
      14 Hour(s)

Reference week

Lecture
Exercise, TP
Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German