Fiches de cours 2017-2018

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Nanofabrication with focused electron and ion beams

MSE-619

Lecturer(s) :

Hoffmann Patrik
Utke Ivo

Language:

English

Frequency

Every 2 years

Remarque

Next time August 2017

Summary

Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.

Content

Note

Limited to 16 students

Keywords

FIB, FEB, nanofabrication, integrated setups for in-situ measurements (chemical, mechanical, structural, electronical) of nanostructures and their in-situ synthesis (gas injection)

Learning Prerequisites

Recommended courses

Physics and Chemistry at university level, general concepts of NanoSciences and Fabrication

In the programs

Reference week

 
      Lecture
      Exercise, TP
      Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German