Fiches de cours 2017-2018

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Micro/Nanomechanical devices

ME-426

Enseignant(s) :

Villanueva Torrijo Luis Guillermo

Langue:

English

Summary

In this course we will see an overview of the exciting field of Micro and Nanomechanical systems. We will go over the dfferent scaling laws that dominate the critical parameters, how size affects material properties, how these devices are manufactured, designed and later used.

Content

The idea of this course is to give a full view of the field of MEMS/NEMS mostly from a mechanical engineering standpoint. The course will be divided into the following sections:

  1. Introduction - Scaling laws: we will briefly see the where does the interest on this devices stems from. Reduction of dimensions not only to fit things into small places.
     
  2. Fabrication: Briefly, we will study how these devices are manufactured and how this departs from the more typical (classical) way of machining.
  3. Static deflection: due to forces, due to surface stress and/or temperature changes, and due to acceleration.
  4. Normal modes calculation: normal modes calculation (frequencies and mode shapes), mechanical nonlinearities.
  5. Material properties: We will analyze if and how material properties depend on the size of the fabricated device.
  6. Quality factor: The fundamental damping sources for small mechanical resonators will be analyzed, including thermoelastic damping, anchor losses, and stress-based dissipation dilution.
  7. Transduction: Since these devices are very small, the usual ways of detecting and creating motion cannot be applied anymore. We will briefly study the different options with their advantages and disadvantages.
  8. Noise: A study of how noise appears in these systems will be performed.
  9. Applications: The different applications of these devices will be briefly reviewed.

 

 

Keywords

Learning Outcomes

By the end of the course, the student must be able to:

Transversal skills

Teaching methods

 

Assessment methods

 

Supervision

Office hours Yes
Assistants No
Forum No

Resources

Virtual desktop infrastructure (VDI)

No

Bibliography

http://www.springer.com/us/book/9783319286891

(Available for free from EPFL - electronic copy)

Ressources en bibliothèque

Dans les plans d'études

Semaine de référence

 LuMaMeJeVe
8-9     
9-10     
10-11 MED 2 1522   
11-12    
12-13 MED 2 1522   
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22     
 
      Cours
      Exercice, TP
      Projet, autre

légende

  • Semestre d'automne
  • Session d'hiver
  • Semestre de printemps
  • Session d'été
  • Cours en français
  • Cours en anglais
  • Cours en allemand