Fiches de cours 2017-2018

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Integrated circuits technology

EE-532

Enseignant(s) :

Sallese Jean-Michel

Langue:

English

Summary

This course will give an overview of some of the most relevant aspects of CMOS technology used to design and fabricate integrated circuits. Current research and challenges brought about by shrinking Field Effect Transistors down to the nm scale will also be tackled.

Content

'Introduction & Basics of integration technology

'Cleaning processes

'Thermal treatments

'Implantation

'Semiconductor Film growth

'Lithography

'Etching processes

'Metallization

'Process Integration

'Advanced multigate nano scale FET architectures.

Keywords

Silicon

CMOS

MOSFET

SOI

Implantation.

Etchning.

Annealing

isolation

oxide

 

Learning Prerequisites

Important concepts to start the course

No prequisite is needed, however very basic knowledge about MOSFET principles is welcome.

Learning Outcomes

By the end of the course, the student must be able to:

Transversal skills

Teaching methods

Class lectures.

Correction of exercices left for home work.

Expected student activities

Some training exercices.

Assessment methods

Written examination without documents:

Balance between question on the course content and exercices

Supervision

Office hours Yes
Assistants No
Forum No

Dans les plans d'études

Semaine de référence

 LuMaMeJeVe
8-9DIA005    
9-10    
10-11     
11-12     
12-13     
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22     
 
      Cours
      Exercice, TP
      Projet, autre

légende

  • Semestre d'automne
  • Session d'hiver
  • Semestre de printemps
  • Session d'été
  • Cours en français
  • Cours en anglais
  • Cours en allemand