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Coursebooks 2017-2018
Surface and thin films processes
CH-725
Lecturer(s) :
Karimi AyatLanguage:
English
Remarque
Next time: Fall 2018Summary
Giving a basic knowledge of modern nanoscale thin film technology, characterisation techniques, emerging thin film materials,applications. To learn essential fundamental aspects&physical principles of thin film nucleation&growth from the vapour phase, understand the link between processing-structureContent
1. Thermodynamic and kinetic theory concepts of surfaces in vacuum, statistical physics of adsorption/desorption at low coverage
2. Physical and chemical vapour deposition principles, ion-surface interactions, momentum transfer, sputter yield, DC and RF sputtering
3. Kinetic theory of gases and vapour, mean free path, condensation on substrate, atom-istic processes, thermal accommodation, binding, surface diffusion
4. Nucleation and growth, surface energy, interface energy, cluster coalescence and de-pletion, island growth, layer by layer growth, film morphology, extended structure zone models
5. Preferred orientation and texture; evolutionary selection model, fractal clustering and shadowing effects, surface energy and self-arrangement, elastic strain and total ener-gy minimization, adatom mobility and competitive growth
6. Origin of stresses in thin films, self assembly and self organisation in nanostructure thin films
7. X-ray diffraction techniques, electron and ion based spectroscopy methods to charac-terise thin films
8. Nanomechanic, nanotribology and adhesion to underlying substrate
9. Nanoscale engineering and design of thin films
10. New insights from first-principle abinitio calculations
11. Emerging thin films and applications
Note
Next session Fall semester 2017
Keywords
High pressure, pressure effect, high pressure gases, activation volume, reaction volume
In the programs
- Semester
- Exam form
Oral - Credits
2 - Subject examined
Surface and thin films processes - Lecture
24 Hour(s) - Practical work
4 Hour(s)
- Semester
- Semester
- Exam form
Oral - Credits
2 - Subject examined
Surface and thin films processes - Lecture
24 Hour(s) - Practical work
4 Hour(s)
- Semester
- Semester
- Exam form
Oral - Credits
2 - Subject examined
Surface and thin films processes - Lecture
24 Hour(s) - Practical work
4 Hour(s)
- Semester
Reference week
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- Autumn semester
- Winter sessions
- Spring semester
- Summer sessions
- Lecture in French
- Lecture in English
- Lecture in German