Coursebooks 2017-2018


Surface and thin films processes


Lecturer(s) :

Karimi Ayat




Next time: Fall 2018


Giving a basic knowledge of modern nanoscale thin film technology, characterisation techniques, emerging thin film materials,applications. To learn essential fundamental aspects&physical principles of thin film nucleation&growth from the vapour phase, understand the link between processing-structure


1. Thermodynamic and kinetic theory concepts of surfaces in vacuum, statistical physics of adsorption/desorption at low coverage

2. Physical and chemical vapour deposition principles, ion-surface interactions, momentum transfer, sputter yield, DC and RF sputtering

3. Kinetic theory of gases and vapour, mean free path, condensation on substrate, atom-istic processes, thermal accommodation, binding, surface diffusion

4. Nucleation and growth, surface energy, interface energy, cluster coalescence and de-pletion, island growth, layer by layer growth, film morphology, extended structure zone models

5. Preferred orientation and texture; evolutionary selection model, fractal clustering and shadowing effects, surface energy and self-arrangement, elastic strain and total ener-gy minimization, adatom mobility and competitive growth

6. Origin of stresses in thin films, self assembly and self organisation in nanostructure thin films

7. X-ray diffraction techniques, electron and ion based spectroscopy methods to charac-terise thin films

8. Nanomechanic, nanotribology and adhesion to underlying substrate

9. Nanoscale engineering and design of thin films

10. New insights from first-principle abinitio calculations

11. Emerging thin films and applications


Next session Fall semester 2017


High pressure, pressure effect, high pressure gases, activation volume, reaction volume

In the programs

Reference week

      Exercise, TP
      Project, other


  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German