Coursebooks

Scaling laws & simulations in micro & nanosystems

MICRO-470

Lecturer(s) :

Quack Niels
Renaud Philippe
Shea Herbert

Language:

English

Summary

This class combines an analytical and finite elements modeling (FEM) simulations approach to scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles.

Content

The following topics are introduced and analytical modeling and scaling laws are discussed.

The following topics are introduced and hands-on finite modeling is performed using COMSOL Multiphysics for typical microsystems. For a selected set of problems, lumped element modeling is introduced and discussed. 

Keywords

Micro-Electro-Mechanical Systems (MEMS)

Nano-Electro-Mechanical Systems (NEMS)

Scaling

Finite Element Method (FEM)

Lumped Element Model (LEM)

Electrostatics

Electromagnetic

Fluidic

Cantilever

COMSOL

Learning Prerequisites

Required courses

Capteurs

Important concepts to start the course

solid grasp of electromagnetics, electrostatics, fluid dynamics

knowledge of analysis of electrical circuits

mastery of Matlab

Learning Outcomes

By the end of the course, the student must be able to:

Transversal skills

Teaching methods

ex-cathedra

problem sets

simulations tutorials

simulation projects

Expected student activities

attend all lectures

attend all FEM tutorial sessions

read assigned papers

do the problem sets

Assessment methods

project

oral exam

In the programs

Reference week

 MoTuWeThFr
8-9     
9-10     
10-11     
11-12     
12-13     
13-14BC07-08
MA B1 11
MAB1486
    
14-15    
15-16    
16-17BC07-08
MA B1 11
MAB1486
    
17-18     
18-19     
19-20     
20-21     
21-22     
 
      Lecture
      Exercise, TP
      Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German