Coursebooks 2017-2018

PDF
 

Scaling in MEMS

MICRO-606

Lecturer(s) :

Renaud Philippe
Shea Herbert

Language:

English

Frequency

Every 2 years

Remarque

August 30 & 31, 2017

Summary

This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.

Content

 

Keywords

Scaling laws, thermal micro-actuators, electromagnetic micro-actuators, microfluidics, electrokinetics

Learning Prerequisites

Recommended courses

In the programs

Reference week

 
      Lecture
      Exercise, TP
      Project, other

legend

  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German