Coursebooks 2017-2018

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Scaling in MEMS

MICRO-606

Lecturer(s) :

Renaud Philippe
Shea Herbert

Language:

English

Frequency

Every 2 years

Remarque

August 30 & 31, 2017

Summary

This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.

Content

Keywords

Scaling laws, thermal micro-actuators, electromagnetic micro-actuators, microfluidics, electrokinetics

Learning Prerequisites

Recommended courses

In the programs

  • Advanced Manufacturing (edoc), 2017-2018
    • Semester
    • Exam form
      Oral presentation
    • Credits
      1
    • Subject examined
      Scaling in MEMS
    • Lecture
      14 Hour(s)
  • Microsystems and Microelectronics (edoc), 2017-2018
    • Semester
    • Exam form
      Oral presentation
    • Credits
      1
    • Subject examined
      Scaling in MEMS
    • Lecture
      14 Hour(s)

Reference week

Lecture
Exercise, TP
Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German