Coursebooks

Scaling in MEMS

MICRO-606

Lecturer(s) :

Renaud Philippe
Shea Herbert

Language:

English

Frequency

Every 2 years

Remarque

Next time in Summer 2019 : 20 au 21 aout 2019

Summary

This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.

Content

 

Keywords

Scaling laws, thermal micro-actuators, electromagnetic micro-actuators, microfluidics, electrokinetics

Learning Prerequisites

Recommended courses

In the programs

Reference week

 
      Lecture
      Exercise, TP
      Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German