Coursebooks

Reliability of MEMS (EDOC)

MICRO-615

Lecturer(s) :

Shea Herbert

Language:

English

Frequency

Every 2 years

Remarque

Next time in Summer 2019

Summary

This doctoral class addresses the reliability of silicon and metal MEMS, covering i) Reliability Statistics, ii) Electrical Reliability of MEMS, iii) Mechanical Reliability of MEMS, and iv) Design for Reliability Paradigm.

Content

Keywords

Reliabilty, MEMS, mechanical failure modes, electrical failure modes.

Learning Prerequisites

Recommended courses

Understanding of main MEMS sensing and actuation principles

In the programs

  • Advanced Manufacturing (edoc), 2018-2019
    • Semester
    • Exam form
      Oral
    • Credits
      1
    • Subject examined
      Reliability of MEMS (EDOC)
    • Number of places
      22
    • Lecture
      14 Hour(s)

Reference week

Lecture
Exercise, TP
Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German