Coursebooks 2017-2018

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MOOC: Micro and Nanofabrication (MEMS)

MICRO-621

Lecturer(s) :

Brugger Jürgen
Gijs Martinus

Language:

English

Frequency

Every year

Remarque

From September 19 to October 31, 2017

Summary

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC will not only explain the basics of microfabrication but also show the practice through videos.

Content

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.

In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it's done through video sequences and zooming into the equipment.

Course Syllabus

Week 1: MEMS and cleanroom introduction
Week 2: Chemical vapour deposition (CVD)
Week 3: Physical vapour deposition (PVD)
Week 4: Lithography
Week 5: Dry etching
Week 6: Wet etching
Week 7: Metrology

Note

PhD students will follow the MOOC on micro and nanofabrication (scheduled during 7 weeks at the beginning of each fall semester). The students will also take part in the online questions and quizzes. At the end we set up an oral exam with the teachers.

Keywords

microfabrication, cleanroom techniques, theory and visual demonstration by video sequences, quizzes.

Learning Prerequisites

Required courses

basics of physics and chemistry

Recommended courses

none

Learning Outcomes

By the end of the course, the student must be able to:

Resources

Bibliography

Ressources en bibliothèque
Notes/Handbook

Contact person: Matthieu Ruegg matthieu.ruegg@epfl.ch

Websites

In the programs

  • Advanced Manufacturing (edoc), 2017-2018
    • Semester
    • Exam form
      Oral
    • Credits
      1
    • Subject examined
      MOOC: Micro and Nanofabrication (MEMS)
    • Lecture
      14 Hour(s)
    • Exercises
      14 Hour(s)
  • Microsystems and Microelectronics (edoc), 2017-2018
    • Semester
    • Exam form
      Oral
    • Credits
      1
    • Subject examined
      MOOC: Micro and Nanofabrication (MEMS)
    • Lecture
      14 Hour(s)
    • Exercises
      14 Hour(s)

Reference week

Lecture
Exercise, TP
Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German