Coursebooks 2017-2018

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Microstructuring of glass

MICRO-707

Lecturer(s) :

Gijs Martinus
Parashar Virendra Kumar

Language:

English

Frequency

Every year

Remarque

Next time in Spring 2019

Summary

The course will provide fundamental key aspects governing glass as a material and the microstructuring of glass using a variety of techniques, like dry and wet etching, mechanical and laser machining, as well as sol gel technology. Also concrete application examples will be discussed.

Content

1. Glass as a material
Definition, structure, composition, properties and kinds of glasses

 

2. Techniques for the microstructuring of glass
Wet etching, dry etching, ultrasonic drilling, powder blasting, laser structuring and photosensitive glass

 

3. Replication of glass microstructures
The sol-gel process (spin-on-glass), photosensitive spin-on-glass, the replication process (moulding, de-moulding, annealing)

 

4. Bonding of glass
Anodic bonding, fusion bonding, pressure-assisted bonding, chemical bonding

 

5. Applications of glass microstructures
a. Optical systems (Wave guides, gratings, lenses)
b. Bio-chemical systems (Bio-separation and microfluidics, biosensors)
c. Mechanical systems (Pressure sensors, inkjet printing heads)

Keywords

Glass, microstructuring, replication, sol-gel process, bonding

Learning Prerequisites

Recommended courses

 

 

In the programs

Reference week

 
      Lecture
      Exercise, TP
      Project, other

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  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German