Coursebooks 2017-2018

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Caution, these contents corresponds to the coursebooks of last year


Advanced MEMS & microsystems

MICRO-534

Lecturer(s) :

Briand Danick
Quack Niels

Language:

English

Summary

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.

Content

Introduction: MEMS history, overview of the different types of MEMS and microsystems. Smart systems and 3D architectures. Current state of the art and trends at the academic and industrial levels. Market players and forecasts.

Transducing principles review: Detection (capacitive, piezoresistive, thermal) and actuation (thermal, electromagnetic, electrostatic, piezoelectric) principles of common MEMS devices.

MEMS Sensors: Introduction to motion sensors, 3D accelerometers, gyroscopes, pressure sensors, microphones, resonators, CMOS integration, multi-parametric sensor devices.

MEMS Actuators and Optical MEMS: Electrostatic and magnetic actuators; MOEMS in Consumer Electronics and Mobile (Micromirrors and Arrays, Scanners, Projectors, Displays, MEMS Spectrometers and Optical Filters); MOEMS in Telecommunications (Optical Switches, Tunable Lasers, Filters and Variable Optical Attenuators).

MEMS Gas Sensors: capacitive, resistive, catalytic, FET, optical, silicon micromachined vapor and gas sensing devices, micro-analytical instruments for gas detection.

RF-MEMS: RF resonators for filters, frequency sources, time reference, and sensors.

NEMS: Introduction to Nano electro mechanical systems with particular emphasis on physical, chemical and biological sensors.

Packaging: Die level vs. wafer level, packaging techniques, hermetic packaging, Through Silicon Vias (TSVs), 3D-integration.

Power MEMS: Overview of micro power sources, batteries and solar cells vs. MEMS based devices, energy harvesting (thermal, mechanical and chemical).

Polymeric and Printed Microsystems: Polymeric MEMS on rigid and soft substrates. Printing technologies and printed sensors.

Industrial Seminars: Presenting the manufacturing and/or the implementation of MEMS devices into products

Keywords

MEMS/NEMS, Microsystems, Sensors and Actuators, Motion sensors, Actuators, Resonators, RF, Power, Optical, Polymer, Packaging.

Learning Prerequisites

Recommended courses

Sensors, Materials and Technology of Microfabrication I&II

Learning Outcomes

By the end of the course, the student must be able to:

Transversal skills

Teaching methods

Lectures, exercises, case studies, and seminars from the industry.

Expected student activities

Attendance at lectures and seminars

Reading written material

Solving the exercises

Assessment methods

Oral Examination at the end of the course

Oral presentation during the course

Reports on Industrial Seminars

Resources

Bibliography

Ressources en bibliothèque

In the programs

  • Microengineering, 2017-2018, Master semester 2
    • Semester
      Spring
    • Exam form
      Oral
    • Credits
      3
    • Subject examined
      Advanced MEMS & microsystems
    • Lecture
      3 Hour(s) per week x 14 weeks
    • Lecture
      3 Hour(s) per week x 14 weeks
  • Microengineering, 2017-2018, Master semester 4
    • Semester
      Spring
    • Exam form
      Oral
    • Credits
      3
    • Subject examined
      Advanced MEMS & microsystems
    • Lecture
      3 Hour(s) per week x 14 weeks
    • Lecture
      3 Hour(s) per week x 14 weeks

Reference week

MoTuWeThFr
8-9
9-10
10-11
11-12
12-13
13-14
14-15
15-16
16-17
17-18
18-19
19-20
20-21
21-22
Under construction
Lecture
Exercise, TP
Project, other

legend

  • Autumn semester
  • Winter sessions
  • Spring semester
  • Summer sessions
  • Lecture in French
  • Lecture in English
  • Lecture in German